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Dry etching
Results: 23

#	Item
11	TIME-MULTIPLEXED-PLASMA-ETCHING OF HIGH NUMERICAL APERTURE PARABOLOIDAL MICROMIRROR ARRAYS Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington Seattle, WA[removed]Phone[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-09 02:25:14 Technology Micro-Opto-Electro-Mechanical Systems Etching Mirror Deep reactive-ion etching Plasma Microlens Dry etching Reactive-ion etching Microtechnology Materials science Semiconductor device fabrication
12	A FULLY DRY SELF-ASSEMBLY PROCESS WITH PROPER IN-PLANE ORIENTATION Sangjun Park and Karl F. Böhringer Department of Electrical Engineering, University of Washington, Seattle, Washington, USA ABSTRACT A fully dry self-as Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-10-22 10:46:49 Technology Etching Deep reactive-ion etching Microfabrication Integrated circuit Three-dimensional integrated circuit Wafer Isotropic etching Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
13	Hindawi Publishing Corporation Journal of Nanomaterials Volume 2013, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Review Article Add to Reading List Source URL: downloads.hindawi.com Language: English - Date: 2014-08-28 12:52:18 Physics Microtechnology Plasma processing Spectroscopy Nanotechnology Etching Dry etching Reactive-ion etching Polymer Semiconductor device fabrication Chemistry Materials science
14	Tokai Region Tokai Region Nanotechnology Manufacturing Cluster ●Knowledge Cluster Initiative “Development of Autonomic Nano-Etching Devices” A Major Innovation in Semiconductor Dry Etching Devices Add to Reading List Source URL: www.mext.go.jp Language: English - Date: 2014-04-28 01:48:50 Antioxidant Ion track Materials science Technology Time Emerging technologies Carbon nanotube Nanotechnology
15	News Release Nanoplas Announces Important New 14nm Order and Joint Development Agreement with CEA-Leti High-selectivity dry-etch for 14nm OEM pilot line will replace wet etch; CEA-Leti to qualify the system for addition Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2013-11-27 09:43:38 Technology Etching Plasma processing Microelectromechanical systems Transducers Dry etching Isotropic etching Plasma etching Wafer Semiconductor device fabrication Microtechnology Materials science
16	News Release Nanoplas Announces Important New 14nm Order and Joint Development Agreement with CEA-Leti High-selectivity dry-etch for 14nm OEM pilot line will replace wet etch; CEA-Leti to qualify the system for addition Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2013-11-27 09:43:38 Technology Etching Plasma processing Microelectromechanical systems Transducers Dry etching Isotropic etching Plasma etching Wafer Semiconductor device fabrication Microtechnology Materials science
17	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: www.sgw.com Language: English - Date: 2012-02-08 11:03:30 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
18	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: sgw.com Language: English - Date: 2012-02-08 11:10:47 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
19	PVA TePla 300 Microwave Plasma System Users Manual Coral name: Model: Add to Reading List Source URL: www.nist.gov Language: English - Date: 2013-01-18 08:44:44 Semiconductor device fabrication Chalcogens Nonmetals Oxygen Dry etching Gas Chemistry Matter Periodic table
20	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: sgw.com Language: English - Date: 2012-02-08 11:04:15 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology

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